|
Electronics Manufacturing:
Semiconductors
Sources #1
WASTE ORIGINS: Semiconductor Production
Processes (Crystal Preparation, Wafer Fabrication, Final Layering,
and Cleaning Assembly)
WASTE TYPES: Spent Process Baths, Sludges, Rinse Waters,
and Aqueous Metals
Sources:
EPA Sector Notebook Project: Electronic and Computer Industry,
U.S. EPA, Office of Compliance, September 1995, EPA/310-R-95-001.
(Also accessible via the Internet at the EPA Sector Notebook Home
Page address, http://es.inel.gov/comply/sector/index.html).
Return
to Previous Page
|
